Batch Proccessing Machines

SEABatch XL

Optimized system for high-efficiency solar cell (n-type)
Ultra capacity batch equipment (highest cost performance)

Various Batch Applications

• Alkaline / Acidic texturing / Oxidation
• pSC1 / SC2 / O3 cleaning
• TOPCon, PERC, HIT 

High throughput

• 600 wafers load 
•  Upto 12,000 w/h

Capable Si wafer size

• Upto M12 (210 x 210mm)

SEABatch SEMI

Optimized system for high-efficiency solar cell (n-type)
Ultra capacity batch equipment (highest cost performance)

Various batch Applications

• RCA / SPM / HFO3 / DIO3 cleaning
• Developing / Etching / Stripping
• Oxidation / Special drying

Available for substrate

•  Si wafer up to 300mm • Glass / Ceramics up to 500x500mm

Particle 
Particle performance

• RCA cleaning < 30EA
• Dry < 30EA